Speaker
Description
Atomic layer deposition (ALD) is based on a sequence of self-limiting gas-solid surface reactions. It allows for conformal and smooth coating of highly structured, three-dimensional substrates without shadowing effect and with sub-nm thickness resolution, which makes it particularly interesting for coating the internal surface of SRF cavities. In particular, plasma-enhanced ALD (PEALD), enables the use of metalorganic precursor chemistry not usable in thermal ALD, may improve the quality of the deposited films, can lower deposition temperature.
As a preliminary study, we investigated AlN-NbTiN multilayers grown by PEALD in a supercycle approach. Different compositions and post-deposition thermal treatments have been investigated with respect to their superconducting properties, stoichiometry, and crystallinity and the results will be presented. The findings of our research might pave the way for coating superconductor-insulator-superconductor (SIS) multilayers in superconducting radio-frequency cavities.
