7th International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity

Session

Plasma etching for SRF cavities

Jul 29, 2016, 11:55 AM

Jefferson Lab

Conveners

Plasma etching for SRF cavities

• Robert Rimmer (JLab)

34. Status report on reactive ion etching of SRF cavities in an RF Ar/Cl2 discharge

Mr Jeremy Peschl (Old Dominion University)

7/29/16, 11:55 AM